MICROELECTRONICS
I
Miniaturization and scale of integration. Planar processes in microelectronics
(diffusion, ion implantation, epitaxial growth, oxidation, metallization,
litography, etching). Monolithic bipolar silicon devices (NPN and
PNP transistors, diodes, Schottky diodes, resistors, capacitors,
compatible unipolar transistors in bipolar circuits, enhanced bipolar
transistors). Monolithic unipolar silicon devices (n-MOSFET, CMOSFET,
self-aligned MOSFET, LDDMOSFET, VMOS, DMOS, VDMOS, SOSMOS, SOIMOS,
enhanced CMOSFET). BiMOS and BiCMOS silicon devices. Integrated
circuit design. General rules of the topological design. Functional
microelectronics.
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